Vigilant Power Monitor - Avanced digital RF VI Probe



Advanced RF Power Diagnostic for Plasma Processing Applications (digital vi probe)


  • Customized to your application
  • Plug & Play diagnostics
  • High power rating



R&D engineers

Process engineers

Equipement maintenance engineers


Study of RF discharges

Development of processing tools

Process control

Troubleshooting of RF systems

The Vigilant Power Monitor tracks the RF power delivery in your plasma processing reactor by complete and accurate of RF parameters (power, voltage, current, phase shift, impedance, harmonics...) with minimum perturbation. This probe can be inserted before or after the matching unit inside your plasma system.


We combine many proprietary innovations to offer what is probably the most advanced RF power diagnostics for plasma applications commercially available today:


- Customizable high performance electrical sensors: wideband, robust, low-perturbation and compact voltage and current sensors developed through extensive experimental work and electromagnetic modeling. The characteristics of these sensors are customized during calibration to maximize performance for your application (maximized sensitivity and power rating while minimizing the perturbation).


- High speed / high resolution cutting edge acquisition electronics with USB connectivity to sample directly and simultaneously the RF voltage and current waveforms.


- Automated highly accurate calibration process to ensure the best measurement accuracy and probe-to-probe repeatability. Our calibration process is NIST-traceable and uses the best electronic test instruments available today in a temperature and EMI controlled environment.


- Powerful and intuitive user interface software (Vigilant RF Lab) to display in real-time the measured data which transforms the PC of the user into a state of the art RF laboratory.


Frequency band

RF excitation mode

Max power

Accuracy of power measurement

Max voltage

Max current

Insertion loss




1-150 MHz (1-500MHz on request)

Single frequency (CW, pulsed, frequency agile)

10 kW

+/- 2% on a matched load at the excitation frequency

5kV (peak)

100A (peak)

<0.5% at the excitation frequency

50Ω coaxial line with customized input & output connectors

90mm x 220mm x 40mm (without connectors)

One Vigilant RF Lab licence

Ordering information

In order to provide you with the best suitable probe for your application, please use the following model numbering:


VPM-FREQ-POWER-IN-OUT                    (Example: VPM-13.56-1000-1F-1M)                     

Code Details Values             C: Custom (if not listed)
 FREQ Excitation frequency in MHz  2, 3.39, 4, 6.78, 13.56, 27.12, 40.68, 60, 81.36
POWER Max generator power in Watt 30, 60, 100, 300, 600, 1000, 3000, 6000, 10000



Input connector type and gender

Output connector type and gender

0: No connector (M5 threaded hole)

    1F: N Female                     1M: N Male      

2F: HN Female                   2M: HN Male

   3F: 7/16 Female                  3M: 7/16 Male

4F: LC Female                    4M: LC Male



Vigilant Power Monitor Datasheet
Advanced digital RF vi probe for plasma processing applications
VPM Datasheet.pdf
Adobe Acrobat Document 2.8 MB