RF Metrology PRODUCTS
VIGILANT OSCILLOSCOPE PROBE
The First High Voltage Oscilloscope Probe optimized
for Plasma Processing Applications
Displays the Voltage Waveform on your Oscilloscope
Measures the DC self-bias
- High voltage rating from DC up to the commonly used RF frequencies in plasma applications
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1000X Voltage attenuation from DC to RF
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Small size for an easy integration into tight enclosures
- 3 Interchangeable configurations (traditional, compact and coaxial)
VIGILANT SENSOR
RF Voltage-Current Probe
for Plasma Processing Applications
Displays the Voltage & Current Waveforms on your Oscilloscope
- Customized to your application
- High sensitivity
- High power rating
VIGILANT POWER MONITOR
Advanced RF Power Diagnostic
for Plasma Processing Applications
For CW or Pulsed RF Plasmas
Measures & Monitors the following parameters:
- Dissipated Power
- Voltage & Current Waveforms
- Phase Shift
- Impedance
- Harmonics...
- Customized to your application
- Plug & Play diagnostics
- High power rating
VIGILANT RF LAB
User Interface of the Vigilant Power Monitor
Advanced RF Lab Software
for Plasma Processing Applications
- Customized to your application
- Plug & Play diagnostics
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Intuitive interface