RF Metrology PRODUCTS

VIGILANT OSCILLOSCOPE PROBE

 

The First High Voltage Oscilloscope Probe optimized

                                                     for Plasma Processing Applications

 

Displays the Voltage Waveform on your Oscilloscope

Measures the DC self-bias

  • High voltage rating from DC up to the commonly used RF frequencies in plasma applications
  • 1000X Voltage attenuation from DC to RF
  • Small size for an easy integration into tight enclosures
  • 3 Interchangeable configurations (traditional, compact and coaxial)

VIGILANT SENSOR

 

RF Voltage-Current Probe

for Plasma Processing Applications

 

Displays the Voltage & Current Waveforms on your Oscilloscope

Vigilant Sensor - Analog RF Voltage-Current Probe
  • Customized to your application
  • High sensitivity
  • High power rating

VIGILANT POWER MONITOR

 

Advanced RF Power Diagnostic

for Plasma Processing Applications

 

For CW or Pulsed RF Plasmas

 

Measures & Monitors the following parameters:

  • Dissipated Power
  • Voltage & Current Waveforms
  • Phase Shift
  • Impedance
  • Harmonics...
Vigilant Power Monitor - Advanced Digital RF Power Diagnostics
  • Customized to your application
  • Plug & Play diagnostics
  • High power rating

VIGILANT RF LAB

 

User Interface of the Vigilant Power Monitor

 

Advanced RF Lab Software

for Plasma Processing Applications

 

Screenshot during the acquisition of pulse RF biases
  • Customized to your application
  • Plug & Play diagnostics
  • Intuitive interface