Vigilant RF Lab




RF Lab Software for Plasma Processing Applications

Vigilant RF Lab is the user interface of the Vigilant Power Monitor.


It transform your PC into a state of the art RF laboratory for advanced studies, process monitoring, and plasma diagnostics.


Review of the Vigilant© RF Lab Software (User interface for the Vigilant© Power Monitor)


We make a quick review of the Vigilant RF Lab software while making measurements with an ICP discharge.


Excitation frequency: 13.56MHz
Gas: Oxygen
Pressure: 30mTorr

Description of the ICP reactor

Measured Parameters


  • Dissipated power
  • Forward power
  • Reflected power


Pulsed RF

  • Average & Peak power
  • Power envelope
  • Voltage & Current envelope


Voltage & Current

  • Waveforms
  • Min, Max, RMS
  • Peak-to-peak values



  • Module & Phase
  • Resistance & Reactance
  • Equivalent circuit
  • Smith Chart



  • Harmonic analysis
  • Datalogging
  • During pulses



Operating systems

USB specifications

Windows XP (SP3), Windows Vista, Win7, Win8

Version 2.0 or 3.0


Vigilant RF Lab Datasheet
RF Lab Software for Plasma Processing Applications
VLA Datasheet.pdf
Adobe Acrobat Document 4.4 MB